|
|
|
|
EX5 EXCIMER LASER The low cost mini Excimer NOW WITH TYPE IIa SUPERCHAMBER
Applications
A genuine low cost MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 500Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and a total metal/ceramic laser chamber. NEW TYPE II SUPERCHAMBER The EX5 is now available in 250Hz, 500Hz and 750Hz versions. The TYPE IIa SUPERCHAMBER produces higher average power output with 50% longer gas lifetime. F2 operation in the VUV is also standard with up to 650mW output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas. A 500Hz Industrial version is also available. EX5 Specifications
Key Benefits
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
