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EX5 MINI EXCIMER LASER
6W of deep UV (193nm) in 1.4 cubic feet, 15kg
THE ONLY MINI EXCIMER THAT REALLY IS SMALL AND LIGHT WEIGHT
ALSO THE EX5A And EX5D industrial version
FEATURES
Billons of pulses system lifetime
Instant ant on
Up to 2kHz Operation
2nS RMS JITTER WITH solid state switch
Applications
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Replacement Medical Lasers |
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Ionization source |
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Micromachining |
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Precision Marking |
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Refractive Surgery |
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Raman spectroscopy |
The EX5 a genuine full function MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 1000Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and all metal/ceramic construction
The EX5A is now available in 250Hz, 500Hz and 1000Hz versions. The EX5A SUPER CHAMBER produces higher average power output with longer gas lifetime. F2 operation in the VUV is also standard with up to 1W output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas.
Highlights
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2 year warranty |
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Light, compact and easily portable |
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Long system lifetime Billions of pulses for Industrial installations |
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15kg in Weight |
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Mini excimer in a single package |
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Internal vacuum pump and halogen filter |
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Computer controlled |
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Ultra Low trigger jitter |
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High reliability state of the art, long life laser chamber |
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Excellent pulse to pulse stability |
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Very long shelf life |
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EX5A/1000 NEW 2000Hz version |
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High duty cycle Industrial version |
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20mJ TEM00 C02 TEA Version |
EX5 Specifications
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PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
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Wavelength nm |
157 |
193 |
248 |
308 |
351 |
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Energy Max. mJ |
1.5/2.0* |
12 |
20 |
8 |
6 |
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Peak Power MW |
0.25 |
1.75 |
2.5 |
1.0 |
0.75 |
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Average Power @ 250Hz |
0.3/0.4 |
2.5 |
4.0 |
1.5 |
1.3 |
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Average Power @ 500Hz |
0.5 |
5.0 |
8.0 |
2.5 |
2.4 |
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Repetition rate |
250/500/750 |
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Dynamic gas lifetime Pulses to 50% energy |
10E6 |
12E6 |
18E6 |
20E6 |
15E6 |
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Shelf life to 50% energy |
10 days |
15 days |
30 days |
2 Months |
30 Days |
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Pulse Length nS |
7--9 |
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Stability |
<2% Standard Deviation |
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Tube Service |
2 Billion Pulses |
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Beam Size, mm |
3X 6 |
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Divergence, mRad full angle |
1 X 2 |
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Cooling |
Air standard/Optional Water |
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Timing Jitter |
2nS Standard Deviation |
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Weight |
15kg 250/500Hz |
*2mJ for F2 optimized version.
Laser performance
EX5A
Industrial MINI LASER SYSTEM
Years of operation Billions of pulses
The EX5A offers high performance in a compact mini excimer laser. System lifetime is greatly extended, energy output and average power levels are higher than the standard EX5 unit.
The EX5A is recommended for industrial and rough service applications where high duty cycle and minimal maintenance is required.
Repetition rates to 2000Hz 2 year warranty
EX5A/1000/2000
EX5A Specifications
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PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
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Wavelength nm |
157 |
193 |
248 |
308 |
351 |
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Energy Max. mJ |
1.5/2.5* |
14 |
20 |
12 |
8 |
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Peak Power MW |
0.30 |
2.0 |
2.5 |
1.25 |
0.8 |
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Average Power @ 250Hz |
0.3/0.4 |
3.0 |
5.0 |
2.5 |
1.4 |
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Average Power @ 500Hz |
0.5 |
6.0 |
8.0 |
4.0 |
2.5 |
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Average Power @ 1000Hz |
1.0 |
9 |
14 |
6.0 |
5.0 |
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Energy 2000 Hz Max. mJ |
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0.7 |
0.9 |
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Average power @ 2000Hz |
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0.9 |
1.4 |
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Dynamic gas lifetime Pulses to 50% energy |
10E6 |
12E6 |
18E6 |
20E6 |
15E6 |
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Shelf life to 50% energy |
10 days |
15 days |
30 days |
>2 Months |
30 Days |
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Pulse Length nS |
8-10 |
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Stability |
<2% Standard Deviation |
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Tube Service |
5 Billion of Pulses |
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Beam Size, mm |
3X 6 |
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Divergence, mRad full angle |
1 X 2 |
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Cooling |
Air/Water |
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Timing Jitter |
2nS Standard Deviation |
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Weight |
15kg 250/500Hz, 35kg 1000/2000Hz |
Laser performance data
40 MILLION PULSES ON A SINGLE GAS FILL NO GAS INJECTIONS
*2.5mJ for F2 optimized version.
Download EX5 Data sheet in .pdf format
EX5 Dimensional drawing
EX5 Beam Profile
EX5D
HIGH POWER INDUSTRIAL 40w MIN LASER
up TO 35w STABILIZED
EX5D SPECIFICATIONS
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PARAMETER |
F2 |
Arc |
KrF |
XeCl |
XeF |
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Wavelength nm |
157 |
193 |
248 |
308 |
351 |
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Energy Max. mJ |
3 |
35 |
40 |
20 |
15 |
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Average Power @250Hz |
0,8 |
8 |
10 |
5 |
4 |
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Average Power @500Hz |
1.5 |
16 |
20 |
10 |
7 |
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Average Power @ 1000 |
3 |
32 |
40 |
20 |
15 |
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Repetition Rate, Hz |
250/500/1000 |
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Dynamic gas lifetime to 50% energy |
billion PULSES WITH AUTOFILL |
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Stabilized power W |
2 |
20 |
35 |
15 |
10 |
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Pulse Length, ns |
8-12 |
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Beam Size, mm |
3 X 6 |
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Stability |
<2% Standard Deviation |
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Tube Service |
2-6 Billion Pulses |
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Divergence, mRad full angle |
0.8 X 1.5 |
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Cooling |
Air/Water |
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Window Service |
1000E6 |
1000E6 |
>1000E6 |
200E6 |
300E6 |
up TO 35w STABILIZED
EX5 Dimensional drawing
Features
Saturable magnetic switching
soft corona PREIONIZATION
Arc free discharge
Stabilized energy output
Long gas lifetime
Billions of pulses
High Power
Rep rate to 2000 Hz
AUTO GAS FILL ON MULTIPLE TRIGGERS
low DIVERGENCE
AIR COOLED
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