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EX5 EXCIMER LASER

2.4W of deep UV (193nm) in 1.2 cubic feet

The low cost mini Excimer   NOW WITH TYPE IIa SUPERCHAMBER

Applications

bulletIonization source
bulletCompact OEM systems
bulletMicromachining
bulletRefractive Surgery

A genuine low cost MINI excimer laser in an ultra compact 48 X 26 X 26cm, 15kg, air cooled package with up to 8.0W at 248nm and 4.0W at 193nm and up to 500Hz repetition rate. The laser design features include an internal Faraday cage for ultra low electrical noise and a total metal/ceramic laser chamber.

 

NEW TYPE II SUPERCHAMBER      

The EX5 is now available in 250Hz, 500Hz and 750Hz versions. The TYPE IIa SUPERCHAMBER produces higher average power output with 50% longer gas lifetime.  F2 operation in the VUV is also standard with up to 650mW output power. A new broadband optics set allows operation from 157nm to 351nm with full specifications simply by changing the gas. A 500Hz Industrial version is also available.

Key Benefits

bulletThe most powerful mini excimer available anywhere
bulletMini excimer in a single  package
bulletInternal vacuum pump and halogen filter
bulletComputer controlled
bulletLow trigger jitter
bulletHigh reliability state of the art, long life laser chamber
bulletExcellent pulse to pulse stability
bulletVery long shelf life
bullet250Hz, 500Hz  and 750Hz versions
bulletThe latest in materials science TYPE II SUPERCHAMBER
bulletHigh duty cycle Industrial version
bullet25mJ TEM00 C02 TEA Version

EX5 Specifications

PARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/2* 12 20 8 6
Peak Power kW 250 1500 2500 1000 750
Average Power @ 250Hz 0.3/0.4 2.4 4.0 1.4 1.3
Average Power @ 500Hz 0.5/0.65 4.0 8.0 2.5 2.4
Repetition Rate Max. Hz2  250/500/750
Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50% energy 10 days 20 days 30 days >3 Months 30 Days
Pulse Length nS 8
Stability <3% Standard Deviation
Tube Service 2 Billion Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling AIR
Timing Jitter 2nS Standard Deviation
Weight 15kg

*2mJ for F2 optimized version.

Download EX5 Data sheet in .pdf format

EX5 Powerpoint Presentation

EX5 Dimensional drawing

EX5 Beam Profile