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NARROWBAND EXCIMER LASERS
The EX50LN 1pm line narrowed excimer laser
Applications
 | Spectroscopy |
| Semiconductor metrology |
| Optical tetsing |
Narrowband lasers use intra cavity wavelength dispersive elements to
line narrow the free running spectral range of excimer lasers. Linewidths
of less than 1pm are routinely obtained in table top systems.
LINE NARROWING
A free running excimer laser with a stable resonator produces a spectral
output with a relatively wide bandwidth. For example free running ArF has
a bandwidth of approximately 500pm FWHM. The spectral output can be
greatly narrowed by inserting wavelength dispersive optical elements into
the laser cavity . The narrow band output can also be tuned over a region
which is typically close to the free running bandwidth of the laser. With
both ArF and KrF linewidths of less than 1pm can be obtained. Narrow band
excimer lasers exhibit exceptional coherence properties. For FBG
applications, BraggMaster lasers which
produce high spatial and high temporal coherence are recommended.
The EX50LN is available in a number of repetition rate models from 125Hz
up to 1000Hz with up to 8mJ of narrow band energy at 248nm and 3mJ at
193nm. Higher energy output is available from an oscillator amplifier line
narrowed system which produces up to 100mJ of highly line narrowed 248nm
output.
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PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
|
Wavelength nm line center |
157 |
193.3 |
248.35 |
308-311 |
351, 533 |
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Energy Max. Broadband mJ
|
4 |
15 |
25 |
15 |
10 |
|
Energy Max. <1pm FWHM mJ |
1 Line |
3 |
7 |
3 |
|
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Tuning Range pm |
|
800 |
400 |
N/A |
|
|
Average Power 125Hz |
|
0.30 |
0.75 |
0.30 |
|
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Average Power @250Hz |
|
0.60 |
1.5 |
0.50 |
|
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Average Power @500Hz |
|
1.5 |
2.5 |
1.5 |
|
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Average Power @1000Hz W |
Call |
2.0 |
5.0 |
2.0 |
|
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Dynamic gas lifetime Pulses to 50% energy* |
15E6 |
20E6 |
30E6 |
50E6 |
30E6 |
|
Shelf life Approx. to 50% energy |
15 days |
60 days |
90 days |
1 Year |
90 Days |
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Pulse Length, ns |
14-18 |
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Beam Size, mm |
9 X 4 |
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Divergence, mRad full angle |
0.8 X 1.6 |
| Tube Service |
3 Billion Pulses |
| Window Service |
200E6 |
150E6 |
500E6 |
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Cooling |
Air/Water |
Key Benefits
| Narrow linewidth in a single table top package |
| High spectral intensity |
| Tunable deep UV source |
| Optional Ultra Narrow 0.08pm Linewidth |
| Available Oscillator Amplified line narrowed systems |
Download Data Sheet .pdf
format
Download Dimensional
Drawing
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