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HIGHLY LINE NARROWED EXCIMER LASERS
The EX50LN 1pm highly line narrowed excimer laser
Applications
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Spectroscopy |
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Semiconductor metrology |
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Optical testing |
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0.3pm, 10mJ MOPA output |
Key Benefits
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Narrow line width in a single table top package |
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High spectral intensity |
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Tunable deep UV source |
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Optional Ultra Narrow, 0.5pm, 0.3pm and 0.08pm Line width |
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Available MOPA line narrowed systems |
Narrowband lasers use intra cavity wavelength dispersive elements to line narrow the free running spectral range of excimer lasers. Line widths of less than 1pm are routinely obtained in table top systems.
THE EX50LN HIGHLY LINE NARROWED EXCIMER LASER
A free running excimer laser with a stable resonator produces a spectral output with a relatively wide bandwidth. For example free running ArF has a bandwidth of approximately 500pm FWHM. The spectral output can be greatly narrowed by inserting wavelength dispersive optical elements into the laser cavity . The narrow band output can also be tuned over a region which is typically close to the free running bandwidth of the laser. With both ArF and KrF line widths of less than 1pm can be obtained. Narrow band excimer lasers exhibit exceptional coherence properties. For FBG applications, BraggMaster lasers which produce high spatial and high temporal coherence are recommended.
The EX50LN is available in <1pm and <10pm versions and a number of repetition rate models. with up to 10mJ of narrow band energy at 248nm and 5mJ at 193nm. Higher energy output is available from an oscillator amplifier line narrowed system which produces up to 100mJ of highly line narrowed 248nm output.
EX50LN
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PARAMETER
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F2
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ArF
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KrF
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XeCl
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XeF
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Wavelength nm line center
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157
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193.3
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248.35
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308-311
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351, 533
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Energy Max. <1pm
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2
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4
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2
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2
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Energy Max. <0.35pm
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1 Line
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0.75
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2
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Tuning Range pm
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+/- 200
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+/-200
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N/A
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Average Power 125Hz
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0.30
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.25
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0.3
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0.3
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Average Power @250Hz
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0.5/1
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.5/1
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0.50
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0.5
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Average Power @500Hz
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1/2
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1/2
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1.0
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Stability %
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Call
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<3%
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Dynamic gas lifetime Pulses to 50% energy*
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10E6
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12E6
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15E6
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20E6
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15E6
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Shelf life Approx. to 50% energy
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10 days
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20 days
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30 days
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90 Days
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30 Days
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Pulse Length, ns
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14-18
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Beam Size, mm
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9 X 4
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Divergence, mRad full angle
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0.8 X 1.6
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Tube Service |
2-3 Billion Pulses |
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Window Service |
200E6 |
>500E6 |
>500E6 |
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Cooling
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Air/Water
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Download Data Sheet .pdf format
Download Dimensional Drawing
The Ex5ALN narrow mini line narrowed laser
EX5ALN Specifications
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PARAMETER |
ArF |
KrF |
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Wavelength, nm |
193 |
248 |
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Energy Max., mJ |
5 |
15 |
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Line width, pm typical |
25 |
20 |
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Spectral Line shape |
Gaussian |
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Tunability |
+/-200pm |
+/-200pm |
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Average Power @ 25Hz W |
0.1 |
0.3 |
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Average Power @ 250Hz W |
1.0 |
2.5 |
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Repetition Rate Max. Hz |
25/250 |
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Stabilty |
<3% 1 Sigma |
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Shelf life to 50% energy |
3 days |
10 days |
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Pulse Length nS |
8 |
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Stability |
<3% One Sigma |
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Tube Service |
1000 Million Pulses |
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Beam Size, mm |
3X 6 |
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Divergence, mRad full angle |
1 X 2 |
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Cooling |
AIR |
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Timing Jitter |
2nS One Sigma |
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Weight |
16kg |
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