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THE EX350 EXCIMER LASER
The EX350 is a high energy excimer laser producing
up to 250mJ output energy at 248nm and 150mJ at 193nm. The laser is
designed for applications requiring high pulse energy such as Pulsed Laser
Deposition.
Key Benefits
 | Available in 20Hz and 50Hz versions |
| High Energy in a single table top package |
| Low divergence beam |
| Computer controlled scientific instrument |
| Low Jitter <2nS standard deviation |
EX350 Specifications
|
PARAMETER |
F2
note 1 |
ArF |
KrF |
XeCl |
XeF |
| Wavelength nm |
157 |
193 |
248 |
308 |
351 |
|
Energy Max. mJ |
20 |
150 |
275 |
125 |
100 |
| Average Power 20Hz
version |
|
3 |
5 |
3 |
2 |
|
Average Power 50Hz version |
|
5 |
10 |
6 |
4 |
|
Shelf life Approx. to 50% energy |
5
days |
20
days |
30
days |
6 months |
30
Days |
| Pulse Length |
18-22 nS |
|
System lifetime |
Billions of pulses |
|
Beam Size |
19 X
7 mm |
| Divergence |
3.0 X 1.2 mRad |
| Stability |
<2% Standard Deviation |
| Timing Jitter |
+/- 2nS |
| Dimensions |
850 X 430 X 330 mm |
|
Cooling |
Air/ Water |
|
Electrical |
115/220 AC 20/10A |
| Weight |
75kg |
Note 1 !57nm 10Hz only
The EX350A High Energy laser
EX350A Specifications
|
PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
| Wavelength nm |
157 |
193 |
248 |
308 |
351 |
|
Energy Max. mJ |
22 |
200 |
350 |
200 |
125 |
| Average Power 20Hz
version |
0.4 |
3.0 |
6.0 |
3.0 |
2.0 |
|
Average Power 50Hz version |
0.9 |
6 |
12 |
6 |
4 |
|
Shelf life Approx. to 50% energy |
10
days |
20
days |
30
days |
6 months |
30
Days |
| Pulse Length |
18-22 nS |
|
Beam Size |
19 X
7 mm |
| Divergence |
3.0 X 1.2 mRad |
| Stability |
<2% Standard Deviation |
| Timing Jitter |
+/- 2nS |
|
System Lifetime |
> I Billion pulses |
| Dimensions |
1420 X 430 X 330 mm |
|
Cooling |
Air/ Water |
| Weight |
80kg |
Download EX350 Data sheet .pdf
format
Download EX350 Dimensional
drawing
| 