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157nm F2 LASERS
EX10F 157nm F2 laser
F-version lasers give the longest available gas lifetime at 157nm, with
up to 15 days operation on a single gas fill. F-version lasers also
operate on all other excimer laser wavelengths but at lower energy than
standard lasers. All F-version laser are fitted with an external optics
coupling for connection to a Nitrogen or inert gas purge system.
F2 Lasers operate with HELIUM buffer gas for reduced running costs
compared with systems using NEON buffer.
|
LASER MODEL |
EX10F |
EX50F |
EX100F |
EX100HF |
| Wavelength nm |
157 |
|
Energy Max. mJ |
3.0 |
4.5 |
10 |
15 |
| Average Power W |
0.6 @ 300 Hz |
.8 @ 250 Hz |
1.1 @ 125 Hz |
0.8W@60Hz |
|
Average Power W |
1.2 @ 600 Hz |
1.6 @ 500 Hz |
2.2 @ 250 Hz |
1.6W @125Hz |
| Max. Average
power W |
1.9 @
750Hz |
2.8 @ 750Hz |
4W @500Hz |
3W @ 250Hz |
|
Repetition Rate Hz |
300/600/750 |
250/500/750 |
125/250/500 |
60/125/250 |
| Dynamic gas
lifetime Pulses to 50% energy |
15E6 |
15E6 |
>15E6 |
8E6 |
|
Shelf life Approx. to 50% energy |
15 Days |
15 Days |
15 Days |
15 Days |
| Pulse Length nS |
7 |
10 |
|
Beam Size, mm |
7.5 X 3 |
9 X 3 |
11 X 6 |
| Stability |
<3% Standard Deviation |
|
Divergence, mRad full angle |
1 X 2
|
0.9 X
1.8 |
0.8
X 1.6 |
| Cooling |
Air 250/300/600 Hz /Water 500/750 |
|
Tube Service |
2 Billion Pulses |
| Window Service |
>
500 Million pulses |
Download Brochure in .pdf format
Key Benefits
 | The longest lifetime commercially available 157nm lasers |
| Vacuum Ultraviolet in a table top package |
| VUV purge connector |
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